
[Federal Register Volume 80, Number 48 (Thursday, March 12, 2015)]
[Rules and Regulations]
[Pages 12934-12935]
From the Federal Register Online via the Government Printing Office [www.gpo.gov]
[FR Doc No: 2015-05549]


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ENVIRONMENTAL PROTECTION AGENCY

40 CFR Part 98


Mandatory Greenhouse Gas Reporting

CFR Correction

    In Title 40 of the Code of Federal Regulations, Parts 96 to 99, 
revised as of July 1, 2014, on pages 696 through 698, in subpart I of 
part 98, tables I-5 through I-7 are corrected to read as follows:

   Table I-5 To Subpart I of Part 98--Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for MEMS
                                                                      Manufacturing
--------------------------------------------------------------------------------------------------------------------------------------------------------
                                                                                             Process gas i
                                             -----------------------------------------------------------------------------------------------------------
            Process type factors                                                                      NF3
                                                CF4      C2F6     CHF3    CH2F2     C3F8   c- C4F8   Remote    NF3      SF6     C4F6a    C5F8a    C4F8Oa
--------------------------------------------------------------------------------------------------------------------------------------------------------
Etch 1-Ui...................................      0.7     10.4     10.4    10.06       NA     10.2       NA      0.2      0.2      0.1      0.2       NA
Etch BCF4...................................       NA     10.4    10.07    10.08       NA      0.2       NA       NA       NA     10.3      0.2       NA
Etch BC2F6..................................       NA       NA       NA       NA       NA      0.2       NA       NA       NA     10.2      0.2       NA
CVD Chamber Cleaning 1-Ui...................      0.9      0.6       NA       NA      0.4      0.1     0.02      0.2       NA       NA      0.1      0.1
CVD Chamber Cleaning BCF4...................       NA      0.1       NA       NA      0.1      0.1    20.02     20.1       NA       NA      0.1      0.1
CVD Chamber Cleaning BC3F8..................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA      0.4
--------------------------------------------------------------------------------------------------------------------------------------------------------
Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a
  particular gas is not used in or emitted from a particular process sub-type or process type.
\1\ Estimate includes multi-gas etch processes.
\2\ Estimate reflects presence of low-k, carbide and multi-gas etch processes that may contain a C-containing fluorinated GHG additive.


   Table I-6 To Subpart I of Part 98--Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-
                              Product Formation Rates (Bijk) for LCD Manufacturing
----------------------------------------------------------------------------------------------------------------
                                                                  Process gas i
                                --------------------------------------------------------------------------------
      Process type factors                                                               NF3
                                   CF4      C2F6     CHF3    CH2F2     C3F8   c- C4F8   Remote    NF3      SF6
----------------------------------------------------------------------------------------------------------------
Etch 1-Ui......................      0.6       NA      0.2       NA       NA      0.1       NA       NA      0.3
Etch BCF4......................       NA       NA     0.07       NA       NA    0.009       NA       NA       NA
Etch BCHF3.....................       NA       NA       NA       NA       NA     0.02       NA       NA       NA
Etch BC2F4.....................       NA       NA     0.05       NA       NA       NA       NA       NA       NA
CVD Chamber Cleaning 1-Ui......       NA       NA       NA       NA       NA       NA     0.03      0.3      0.9
----------------------------------------------------------------------------------------------------------------
Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas.
  This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-
  type or process type.


   Table I-7 To Subpart I of Part 98--Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-
                               Product Formation Rates (Bijk) for PV Manufacturing
----------------------------------------------------------------------------------------------------------------
                                                                  Process gas i
                                --------------------------------------------------------------------------------
      Process type factors                                                               NF3
                                   CF4      C2F6     CHF3    CH2F2     C3F8   c- C4F8   Remote    NF3      SF6
----------------------------------------------------------------------------------------------------------------
Etch 1-Ui......................      0.7      0.4      0.4       NA       NA      0.2       NA       NA      0.4
Etch BCF4......................       NA      0.2       NA       NA       NA      0.1       NA       NA       NA
Etch BC2F6.....................       NA       NA       NA       NA       NA      0.1       NA       NA       NA
CVD Chamber Cleaning 1-Ui......       NA      0.6       NA       NA      0.1      0.1       NA      0.3      0.4

[[Page 12935]]

 
CVD Chamber Cleaning BCF4......       NA      0.2       NA       NA      0.2      0.1       NA       NA       NA
----------------------------------------------------------------------------------------------------------------
Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas.
  This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-
  type or process type.


[FR Doc. 2015-05549 Filed 3-11-15; 8:45 am]
 BILLING CODE 1505-01-D


