Proposed Rule: Mandatory Reporting of Greenhouse Gas Emissions

Meeting Documentation  Meetings with Applied Materials 

Date	Staff Contact Information (Name, email, phone #)	Name of
Organization (Attach list of all attendees names and emails if possible)
	Summary of Discussion (e.g., applicability, reporting requirements,
etc.)	Written Comments Provided?

Did they also submit to Docket?	Date sent to EPA- CCD

Discussions from October 2009 to March 2010 including site visits.  
Kirsten Cappel,   HYPERLINK "mailto:cappel.kirsten@epa.gov" 
cappel.kirsten@epa.gov , (202) 343-9556	Applied Materials: 

• Nadia Wetzler (Nadia_Wetzler@amat.com)

• Dina Schiller (Dina_Schiller@amat.com)

• Phil Chandler (Phil_Chandler@amat.com)

• Bruce Klafter 

(Bruce_Klafter@amat.com)

• Mehran Moalem (Mehran_Moalem@amat.com)

• EPA and EPA contractors 	Discussions items included:

• Methods for tracking gas consumption including the use of heel
factors; 

• Existing methods for estimating facility emissions and gas tracking
by process; and 

• Abatement system destruction or removal efficiency testing;

Also discussed refinement of semiconductor manufacturing process
categories including ways process categories could be refined to best
capture variability.  In addition, discussed the availability of
emission factors for the refined process categories.  	NA 	March 15,
2010



