1
Table
5.
Summary
of
Federal
Burden
Final
NESHAP
for
Existing
Semiconductor
Manufacturing
Facilities
Labor
hours
Dollars
Year
after
promulgation
Existing
New
Total
Existing
New
Total
sources
sources
sources
sources
Year
1
209
0
209
$
8,426
$
0
$
8,426
Year
2
35
0
35
1,389
0
1,389
Year
3
35
0
35
1,389
0
1,389
Total
278
0
278
11,204
0
11,204
Annual
average
93
0
93
$
3,735
$
0
$
3,735
