.

STANDARD
FORM
83­
I
SUPPORTING
STATEMENT
FOR
OMB
REVIEW
OF
ICR
NO.
2042.02
INFORMATION
COLLECTION
REQUEST
FOR
THE
SEMICONDUCTOR
MANUFACTURING
SOURCE
CATEGORY
U.
S.
ENVIRONMENTAL
PROTECTION
AGENCY
EMISSION
STANDARDS
DIVISION
RESEARCH
TRIANGLE
PARK,
NORTH
CAROLINA
27711
January
24,
2003
1
PART
A
OF
THE
SUPPORTING
STATEMENT
1.
IDENTIFICATION
OF
THE
INFORMATION
COLLECTION
1(
a)
Title
and
Number
of
the
Information
Collection.

A
supporting
statement
was
prepared
for
"
Recordkeeping
and
Reporting
Requirements
for
the
Information
Collection
Request
(
ICR)
for
National
Emission
Standards
for
Hazardous
Air
Pollutants
(
NESHAP)
for
Semiconductor
Manufacturing."
This
is
a
new
information
collection
request
and
the
tracking
number
is
EPA
ICR
No.
2042.02.

1(
b)
Short
Characterization.

This
ICR
is
prepared
for
a
U.
S.
Environmental
Protection
Agency
(
EPA)
rulemaking
developed
under
authority
of
section
112
of
the
Clean
Air
Act
(
CAA).
The
rulemaking
amends
title
40,
chapter
I,
part
63
of
the
Code
of
Federal
Regulations
(
CFR)
subpart
BBBBB
 
National
Emission
Standards
for
Hazardous
Air
Pollutants:
Semiconductor
Manufacturing
(
hereafter,
this
subpart
is
referred
to
as
the
"
Semiconductor
Manufacturing
NESHAP").
The
Semiconductor
Manufacturing
NESHAP
includes
standards
for
major
sources
of
hazardous
air
pollutants
(
HAP).

Respondents
are
owners
or
operators
of
affected
sources
regulated
under
the
Semiconductor
Manufacturing
NESHAP.

This
ICR
is
for
HAP
emission
sources
in
the
semiconductor
manufacturing
source
category.
The
semiconductor
manufacturing
source
category
consists
of
an
estimated
127
facilities.
Of
these,
only
one
facility
will
be
subject
to
the
Semiconductor
Manufacturing
NESHAP.
The
remaining
facilities
in
the
source
category
are
either
area
sources
or
synthetic
minor
sources
with
enforceable
permit
conditions
limiting
their
emissions
to
below
major
source
thresholds.

All
existing
sources
must
be
in
compliance
with
the
requirements
of
the
Semiconductor
Manufacturing
NESHAP
within
three
years
of
the
effective
date
(
promulgation
date)
of
the
standards.
All
new
or
reconstructed
sources
must
be
in
compliance
upon
startup
or
as
soon
as
the
source
becomes
subject
to
the
Semiconductor
Manufacturing
NESHAP.

This
ICR
includes
one
major
source
Semiconductor
Manufacturing
facility
which
is
subject
to
the
rule.
The
facility
is
already
in
compliance
with
the
provisions
of
the
rule;
therefore,
2
its
compliance
burden
is
reduced.
In
addition,
this
source
is
not
using
add­
on
control
devices
to
meet
the
emission
limits;
therefore,
provisions
related
to
startup,
shutdown,
and
malfunction
plans
are
not
applicable.
The
estimated
cost
for
this
facility
to
conduct
all
MIRR
activities
during
the
first
three
years
after
promulgation
of
the
NESHAP
is
$
6,956.
In
addition,
126
facilities
will
only
read
the
rule.
The
estimated
costs
for
this
one
activity
is
$
262
per
facility.
This
gives
total
monitoring,
inspection,
reporting,
and
recordkeeping
(
MIRR)
costs
of
$
40,029
for
the
semiconductor
manufacturing
source
category
during
the
first
three
years
after
promulgation
of
a
NESHAP
for
this
source
category.
See
Section
6
of
this
document
for
more
details.

2.
NEED
FOR
AND
USE
OF
THE
COLLECTION
2(
a)
Need/
Authority
for
the
Collection.

We
are
directed
by
section
112
of
the
CAA
to
regulate
the
emission
of
HAP
from
stationary
sources.
The
semiconductor
manufacturing
source
category
is
a
major
source
of
HAP
emissions
included
on
our
list
of
categories
scheduled
for
regulation.

Section
114
of
the
CAA
gives
us
authority
to
collect
data
and
information
necessary
to
enforce
standards
established
under
section
112
of
the
CAA.
Certain
records
and
reports
are
necessary
to
enable
the
Administrator
to
(
1)
identify
existing
and
new
sources
subject
to
the
Semiconductor
Manufacturing
NESHAP
and
(
2)
ensure
that
the
requirements
specified
for
an
affected
source
subject
to
the
Semiconductor
Manufacturing
NESHAP
are
being
achieved.

2(
b)
Use/
Users
of
the
Data.

The
information
will
be
used
by
our
enforcement
personnel
to
(
1)
identify
existing
and
new
HAP
emission
points
subject
to
the
Semiconductor
Manufacturing
NESHAP,
(
2)
identify
the
emission
control
devices
and
methodologies
being
applied,
and
(
3)
ensure
that
the
emission
control
devices
and
methodologies
are
being
properly
operated
and
maintained
on
a
continuous
basis.

Records
and
reports
are
necessary
to
enable
us
to
identify
facilities
subject
to
the
Semiconductor
Manufacturing
NESHAP
that
may
not
be
in
compliance.
Based
on
reported
information,
we
can
decide
whether
to
inspect
a
facility
and
which
records
or
processes
to
inspect.
The
records
that
facilities
maintain
must
indicate
to
us
whether
facility
personnel
are
operating
and
maintaining
emission
control
devices
and
methodologies
properly.
3
3.
NONDUPLICATION,
CONSULTATIONS,
AND
OTHER
COLLECTION
CRITERIA
3(
a)
Nonduplication.

A
search
of
our
existing
standards
and
ongoing
ICRs
revealed
no
duplication
of
information
gathering
efforts.
However,
certain
reports
required
by
State
or
local
agencies
may
duplicate
information
required
by
the
standard
(
e.
g.,
records
of
performance
tests).
In
such
cases,

a
copy
of
the
report
submitted
to
the
State
or
local
agency
may
be
sent
in
lieu
of,
or
as
a
part
of,

the
report
required
by
the
standards.

3(
b)
Public
Notice
Required
Prior
to
ICR
Submission
to
OMB.

This
section
does
not
apply
since
public
notice
was
given
as
part
of
the
proposal
process
for
the
Semiconductor
Manufacturing
NESHAP.

3(
c)
Consultations.

The
ICR
handbook
states
that
OMB
regulations
require
periodic
consultation
with
respondents
and
data
users
such
as
members
of
industry
as
well
as
State
and
local
governments.

Consultations
with
numerous
representatives
of
companies
involved
with
semiconductor
manufacturing
were
conducted
throughout
the
NESHAP
development
process.
Table
1
presents
a
list
of
the
names,
affiliations,
and
telephone
numbers
of
persons
that
provided
input
during
development
of
the
rule.

Public
comments
on
the
Semiconductor
Manufacturing
NESHAP
were
solicited
by
the
proposal
notice.
The
EPA
received
a
total
of
four
letters
commenting
on
the
proposed
rule;

comments
were
summarized
and
addressed
in
the
EPA
document
"
Background
Information
Document
for
Promulgation
of
National
Emissions
Standards
for
Hazardous
Air
Pollutants
NESHAP):
Semiconductor
Manufacturing
­
Summary
of
Public
Comments
and
Responses."

3(
d)
Effects
of
Less
Frequent
Collection.

If
the
requirement
for
the
designated
representatives
of
owners
and
operators
of
affected
sources
to
submit
compliance
demonstrations
of
relevant
information
were
collected
less
frequently,
we
would
not
be
reasonably
assured
that
a
source
is
in
compliance
with
the
NESHAP.

In
addition,
our
authority
to
take
administrative
action
would
be
significantly
reduced.
4
TABLE
1.
SEMICONDUCTOR
MANUFACTURING
CONSULTATIONS
Name
Affiliation
Martin
Bauer
Micron
Technology
Incorporated
David
Bock
Harris
Semiconductor
Edan
Dione
IBM
Stephen
Dixon
Delphi
Delco
Electronic
Systems
Chuck
Fraust
Lucent
Technologies
Gordon
Greene
Cherry
Semiconductor
Julia
Hatcher
Latham
&
Watkins
Greg
Landy
Oregon
DEQ
Tim
Mohin
Intel
Lee
Neal
SIA
Mike
Sherer
Motorola
J.
P.
Suplita
Texas
Instruments
Todd
Rollison
Gallagher
&
Kennedy
Carla
Yetter
SHE
Electronics
Section
113(
d)
of
the
CAA
limits
the
assessment
of
administrative
penalties
to
violations
which
occur
no
more
than
12
months
before
initiation
of
the
administrative
proceeding.
Since
administrative
proceedings
are
less
costly
and
require
use
of
fewer
resources
than
judicial
proceedings,
both
we
and
the
regulated
community
benefit
from
preservation
of
our
administrative
powers.

3(
e)
General
Guidelines.

The
Semiconductor
Manufacturing
NESHAP
requires
owners
or
operators
of
an
affected
source
to
retain
records
for
five
years,
which
exceeds
the
three­
year
retention
period
contained
in
the
guidelines
in
5
CFR
1320.6.
The
five­
year
retention
period
is
consistent
with
the
provisions
of
the
General
Provisions
of
40
CFR
part
63
and
the
retention
requirement
in
the
operating
permit
5
program
under
title
V
of
the
CAA.
All
subsequent
general
guidelines
have
been
followed
and
do
not
violate
any
of
the
Paperwork
Reduction
Act
guidelines
contained
in
5
CFR
1320.6.

3(
f)
Confidentiality.

All
information
submitted
to
us
for
which
a
claim
of
confidentiality
is
made
will
be
safeguarded
according
to
our
policies
set
forth
in
Title
40,
chapter
1,
part
2,
subpart
B,

Confidentiality
of
Business
Information.
See
40
CFR;
41
FR
36902,
September
1,
1976;

amended
by
43
FR
3999,
September
8,
1978;
43
FR
42251,
September
28,
1978;
and
44
FR
17674,
March
23,
1979.
Even
where
we
have
determined
that
data
received
in
response
to
an
ICR
is
eligible
for
confidential
treatment
under
40
CFR
part
2,
subpart
B,
we
may
nonetheless
disclose
the
information
if
it
is
"
relevant
in
any
proceeding"
under
the
statute
[
42
U.
S.
C.
7414
(
C);
40
CFR
2.301
(
g)].
The
information
collection
complies
with
the
Privacy
Act
of
1974
and
Office
of
Management
and
Budget
(
OMB)
Circular
108.

3(
g)
Sensitive
Questions.

Information
to
be
reported
consists
of
emissions
data
and
other
information
that
are
not
of
a
sensitive
nature.
Therefore,
this
section
is
not
applicable.

4.
THE
RESPONDENTS
AND
THE
INFORMATION
REQUESTED
4(
a)
Respondents/
SIC
and
NAICS
Codes.

Respondents
are
owners
or
operators
of
all
existing
and
new
HAP­
emitting
affected
sources
in
the
semiconductor
manufacturing
source
category.
The
source
category
and
affected
sources
regulated
by
the
Semiconductor
Manufacturing
NESHAP
are
classified
in
North
American
Industrial
Classification
System
(
NAICS)
code
334413.
This
code
includes
all
operations
performed
in
the
manufacture
of
semiconductors
or
related
solid
state
devices.

Examples
of
semiconductors
and
related
solid
state
devices
include
semiconductor
diodes,

semiconductor
stacks,
rectifiers,
integrated
circuits,
transistors,
solar
cells,
and
light
sensing
and
emitting
devices.
NAICS
code
334413
includes
all
processing
from
crystal
growth
through
circuit
separation,
encapsulation,
and
testing.

4(
b)
Information
Requested.

4(
b)(
i)
Data
items,
including
recordkeeping
requirements.
6
The
Semiconductor
Manufacturing
NESHAP
requires
that
an
owner
or
operator
of
a
major
source
reduce
specified
affected
source
HAP
emissions.
The
affected
source
and
emissions
control
requirements
are
determined
on
a
source
category­
specific
basis.
Information
requirements
under
the
Semiconductor
Manufacturing
NESHAP
are
discussed
in
the
following
paragraphs.

Respondents
are
required
to
submit
one­
time
reports
of
the
(
1)
start
of
construction
for
new
facilities,
(
2)
anticipated
and
actual
start­
up
dates
for
new
facilities,
and
(
3)
physical
or
operational
changes
to
existing
facilities.
All
records
are
to
be
maintained
by
the
facility
for
a
period
of
at
least
five
years.

An
affected
source
with
an
initial
startup
date
before
the
promulgation
date
of
standards
for
an
affected
source
under
the
Semiconductor
Manufacturing
NESHAP
must
submit
a
one­
time
initial
notification.
For
semiconductor
manufacturing
sources
constructed
or
reconstructed
after
the
effective
date
of
the
rule,
the
General
Provisions
to
40
CFR
part
63
require
that
the
source
submit
an
application
for
approval
of
construction
or
reconstruction.
The
application
is
required
to
contain
information
on
the
air
pollution
control
that
will
be
used
for
each
potential
HAP
emission
point.

The
information
in
the
initial
notification
and
the
application
for
construction
or
reconstruction
will
enable
enforcement
personnel
to
identify
the
number
of
sources
subject
to,
or
are
already
in
compliance
with,
the
rule.

Affected
sources
subject
to
the
Semiconductor
Manufacturing
NESHAP
must
submit
a
notification
of
compliance
status.
This
notification
must
be
signed
by
a
responsible
company
official
who
certifies
its
accuracy
and
that
the
affected
source
has
complied
with
the
relevant
standards.
Performance
test
results
(
as
applicable)
are
included
as
part
of
the
compliance
status
report.

The
General
Provisions
requires
owners
or
operators
of
affected
sources
to
develop
startup,
shutdown,
and
malfunction
(
SSM)
plans,
documenting
procedures
that
will
be
taken
in
the
case
of
any
of
these
events.
Startup,
shutdown,
and
malfunction
reports
demonstrating
the
actions
taken
by
an
owner
or
operator
in
the
event
of
a
SSM
are
required
to
be
submitted.
7
Reports
are
required
semi­
annually
when
actions
taken
are
consistent
with
the
plan.
Immediate
reports
are
required
when
actions
taken
are
inconsistent
with
the
plan.

The
Semiconductor
Manufacturing
NESHAP
requires
owners
or
operators
of
an
affected
source
to
retain
records
for
five
years,
which
exceeds
the
three­
year
retention
period
contained
in
the
guidelines
in
5
CFR
1320.6.
The
five­
year
retention
period
is
consistent
with
the
General
Provisions
and
the
retention
requirement
in
the
operating
permit
program
under
title
V
of
the
CAA.

4(
b)(
ii)
Respondent
activities.

Respondent
activities
for
major
sources
are
shown
for
each
of
the
first
three
years
following
promulgation
of
the
rule.
The
respondent
activities
required
by
the
Semiconductor
Manufacturing
NESHAP
for
existing
major
sources
are
presented
in
Tables
2a
through
2c.
We
do
not
project
any
new
major
source
facilities
for
this
source
category
within
the
first
three
years
after
the
promulgation
of
this
NESHAP.
Any
new
facilities
in
the
source
category
are
expected
to
be
either
area
sources
or
synthetic
minor
sources
with
enforceable
permit
conditions
limiting
their
emissions
to
below
major
source
thresholds.

The
labor
hour
and
cost
estimates
of
MIRR
activities
are
summarized
in
Table
3.

5.
THE
INFORMATION
COLLECTED­­
AGENCY
ACTIVITIES,
COLLECTION
METHODOLOGY,
AND
INFORMATION
MANAGEMENT
5(
a)
Agency
Activities.

A
list
of
our
activities
is
provided
in
Tables
4a
through
4c.
Table
5
summarize
the
estimated
labor
hours
and
costs
for
us.
These
tables
are
introduced
in
Section
6(
c)
of
this
document.

5(
b)
Collection
Methodology
and
Management.

Information
contained
in
the
one­
time
only
reports
will
be
entered
into
the
Aerometric
Information
Retrieval
System
(
AIRS)
Facility
Subsystem
(
AFS)
that
is
maintained
and
operated
by
our
Office
of
Air
Quality
Planning
and
Standards
(
OAQPS).
Information
contained
in
the
periodic
reports
submitted
to
us
will
be
reviewed
for
accuracy
and
completeness.
Data
obtained
during
periodic
visits
by
our
personnel
from
records
maintained
by
the
respondents
will
be
8
tabulated
and
published
for
internal
use
in
compliance
and
enforcement
programs.

5(
c)
Small
Entity
Flexibility.

Minimizing
the
information
collection
burden
for
all
sizes
of
organizations
is
a
continuing
effort
on
our
part.
We
have
reduced
the
recordkeeping
and
reporting
requirement
respondent
burden
to
include
only
the
information
needed
by
us
to
determine
compliance
with
the
Semiconductor
Manufacturing
NESHAP.
The
rule
is
applicable
to
only
major
sources,
and
the
one
major
source
subject
to
the
rule
is
not
a
small
business.
Therefore,
we
do
not
anticipate
that
small
business
considerations
would
apply
in
any
NESHAP
developed
for
the
Semiconductor
Manufacturing
source
category.

5(
d)
Collection
Schedule.

Collection
of
data
will
begin
after
promulgation
of
the
Semiconductor
Manufacturing
NESHAP.
The
schedule
for
reports
required
by
the
rule
is
summarized
below.

The
initial
notification
is
due
120
days
after
the
date
of
promulgation
for
existing
sources.

For
new
sources,
it
is
due
no
later
than
120
days
after
the
source
becomes
subject
to
the
standards.
The
notification
of
compliance
status
is
required
to
be
submitted
no
later
than
30
days
following
completion
by
the
source
of
the
compliance
demonstration
specified
in
the
rule
if
no
performance
testing
is
required,
or
within
60
days
if
performance
testing
is
required.

Affected
sources
must
submit
SSM
reports
semiannually
when
actions
taken
in
the
event
of
a
SSM
are
consistent
with
the
source's
SSM
plan.
If
actions
taken
are
not
consistent
with
the
source's
plan,
an
immediate
report
must
be
submitted.

6.
ESTIMATING
BURDEN
AND
COST
OF
THE
COLLECTION
6(
a)
Estimating
Respondent
Burden.

The
annual
burden
estimates
for
recordkeeping
and
reporting
for
existing
major
sources
are
presented
in
Tables
2a
through
2c.
The
estimates
of
total
technical
labor
hours
per
year
per
source
and
the
number
of
activities
per
respondent
per
year
listed
in
each
table
are
based
upon
experience
with
similar
information
collection
requirements
in
other
NESHAP
development
efforts
and
the
number
of
emission
points
in
each
source.
Activities
that
are
one­
time
only
activities
are
noted
in
the
tables.

6(
b)
Estimating
Respondent
Costs.
9
The
information
collection
activities
for
the
first
three
years
for
affected
sources
subject
to
the
Semiconductor
Manufacturing
NESHAP
are
presented
in
Tables
2a
through
2c.
The
costs
of
these
activities
are
based
on
data
from
U.
S.
Bureau
of
Labor
Statistics
web
site
at
http://
www.
bls.
gov/
news.
release/
ecec.
toc.
htm
Table
12,
accessed
January
28,
2003.
Labor
costs
were
divided
into
the
following
three
categories:
(
1)
technical,
(
2)
managerial,
and
(
3)
clerical.

Managerial
and
clerical
labor
hours
were
calculated
as
5
and
10
percent,
respectively,
of
each
technical
labor
hour
requirement.
In
addition,
the
labor
rates
were
multiplied
by
1.5
to
account
for
overhead
costs.
Therefore,
we
estimated
the
cost
of
technical
labor
for
NAICS
334413
industries,
which
includes
semiconductor
manufacturing,
to
be
$
58.68
per
hour
($
58.68/
hr),
the
cost
of
managerial
labor
to
be
$
74.70/
hr,
and
the
cost
of
clerical
labor
to
be
$
32.07/
hr.
These
estimates
included
fringe
benefits.
All
costs
are
in
Fourth
Quarter
2002
dollars.

6(
c)
Estimating
the
EPA's
Burden
and
Cost.

Because
the
information
collection
requirements
were
developed
as
an
incidental
part
of
the
Semiconductor
Manufacturing
NESHAP,
no
costs
can
be
attributed
to
the
development
of
the
information
collection
requirements.

Because
recordkeeping
and
reporting
requirements
on
the
part
of
the
respondents
are
required
under
section
112
of
the
CAA,
no
operational
costs
will
be
incurred
by
the
Federal
government.
Publication
and
distribution
of
the
information
are
part
of
the
AFS
operated
and
maintained
by
our
OAQPS,
with
the
result
that
no
Federal
costs
can
be
directly
attributed
to
the
ICR
for
publication
and
distribution.

Examination
of
records
to
be
maintained
by
the
respondents
will
occur
incidentally
as
part
of
the
periodic
inspection
of
affected
sources.
Periodic
inspections
are
part
of
our
overall
compliance
and
enforcement
program.
Therefore,
these
examinations
are
not
attributable
to
the
ICR.
The
only
costs
that
the
Federal
government
will
incur
are
user
costs
associated
with
the
analysis
of
the
reported
information.
Labor
rates
and
associated
costs
were
based
on
the
2002
General
Schedule
(
GS)
base
annual
salary
data
from
the
office
of
Personnel
Management
Internet
web
site
(
http://
www.
opm.
gov/
oca/
02tables/
gs_
h.
htm),
accessed
January
28,
2003.
Labor
rates
and
associated
costs
are
based
on
estimated
wage
rates
of
$
67.53/
hr
(
GS­
15/
3
level)
for
10
management,
$
40.85/
hr
(
GS­
12/
3
level)
for
technical,
and
$
20.72/
hr
(
GS­
6/
3
level)
for
administrative.
Labor
rates
include
60
percent
for
overhead
expenses.

6(
d)
Bottom
Line
Burden
Hours
and
Costs/
Master
Tables.

6(
d)(
i)
The
simple
collection.

The
bottom
line
respondent
burden
hours
and
costs
are
calculated
by
adding
total
person­
hours
and
costs.
These
are
summarized
in
Table
3.

The
estimated
total
nationwide
burden
for
regulated
major
sources
over
the
first
three
years
after
promulgation
of
the
Semiconductor
Manufacturing
NESHAP
is
an
average
of
41
labor
hours
per
year
at
an
average
cost
of
$
2,319
per
year
for
the
existing
major
source.
These
figures
do
not
include
the
year
one
costs
of
580
labor
hours
and
$
33,073
associated
with
the
126
nonmajor
sources
that
only
read
the
rule.
The
total
estimated
annual
labor
hour
reporting
and
recordkeeping
burden
is
presented
in
Box
13
of
OMB
83­
I.

The
total
annualized
capital
and
startup
costs
in
Box
14
of
OMB
83­
I
reflects
the
estimated
capital
costs
for
equipment
required
for
MIRR
activities
associated
with
the
major
source
provisions
of
the
proposed
standards.
The
total
estimated
installed
capital
costs
of
this
equipment
is
$
0
for
existing
major
sources.

The
total
annual
estimated
operating
and
maintenance
costs
(
O&
M)
in
Box
14
of
OMB
83­
I
are
calculated
based
on
the
estimated
storage,
filing,
photocopying,
and
postage
costs
for
the
estimated
total
of
2
responses
per
year
(
see
Box
13
of
OMB
83­
I)
associated
with
the
provisions
of
the
Semiconductor
Manufacturing
NESHAP.
Storage,
filing,
and
photocopying
costs
per
response
is
estimated
at
0.5
hour
of
administrative
labor
at
a
rate
of
$
32/
hr
or
$
16
per
response
for
multiple
copies.
First
class
postage
was
estimated
as
$
7.78
per
response
for
mailing
of
a
one­
pound
package
and
two
half­
pound
packages
to
regulatory
agencies.
The
postage
rates
were
based
on
data
from
U.
S.
Postal
Services
Internet
web
site
(
http://
www.
usps.
com/),

accessed
November
11,
2002.
Thus,
the
total
storage,
filing,
photocopying,
and
postage
cost
per
response
is
$
23.78,
for
an
annual
estimated
total
of
$
47.56.

6(
d)(
ii)
The
EPA
tally.

The
bottom
line
Federal
government
burden
hours
and
costs
that
would
result
from
this
ICR
are
presented
in
Tables
4a
through
4c
for
existing
major
sources.
These
estimates
are
11
calculated
by
adding
total
person­
hours
and
costs
from
each
of
the
tables.
Table
5
summarizes
the
Federal
government
burden
hours
and
costs
due
to
the
requirements
of
the
semiconductor
manufacturing
NESHAP.

The
estimated
total
EPA
annual
labor
hours
and
costs
in
the
first
three
years
after
promulgation
are
93
total
labor
hours
per
year
at
a
cost
of
$
3,735
per
year.

6(
d)(
iii)
The
complex
collection.

This
collection
is
a
simple
collection,
therefore,
this
section
does
not
apply.

6(
d)(
iv)
Variations
in
the
annual
bottom
line.

Variation
in
the
annual
bottom
line
for
this
rule
may
occur
(
1)
due
to
the
fact
that
certain
one­
time
activities
would
typically
occur
in
the
first
year
following
promulgation
of
the
rule
and
(
2)
by
the
third
year
following
promulgation
of
the
rule,
when
all
sources
must
be
in
compliance,

and
will
therefore
be
subject
to
recurring
recordkeeping
and
reporting
requirements.

6(
e)
Reasons
for
Change
in
Burden.

This
section
does
not
apply
because
this
is
a
new
collection.

Burden
Statement:
The
annual
public
reporting
and
recordkeeping
burden
for
this
collection
of
information
is
estimated
to
average
117
hours
per
response.
Burden
means
the
total
time,
effort,
or
financial
resources
expended
by
persons
to
generate,
maintain,
retain,
or
disclose
or
provide
information
to
or
for
a
Federal
agency.
This
includes
the
time
needed
to
review
instructions;
develop,
acquire,
install,
and
utilize
technology
and
systems
for
the
purposes
of
collecting,
validating,
and
verifying
information,
processing
and
maintaining
information,
and
disclosing
and
providing
information;
adjust
the
existing
ways
to
comply
with
any
previously
applicable
instructions
and
requirements;
train
personnel
to
be
able
to
respond
to
a
collection
of
information;
search
data
sources;
complete
and
review
the
collection
of
information;
and
transmit
or
otherwise
disclose
the
information.

To
comment
on
the
Agency's
need
for
this
information,
the
accuracy
of
the
provided
burden
estimates,
and
any
suggested
methods
for
minimizing
respondent
burden,
including
the
use
of
automated
collection
techniques,
EPA
has
established
a
public
docket
for
this
ICR
under
Docket
ID
No.
OAR­
2002­
0086,
which
is
available
for
public
viewing
at
the
Air
and
Radiation
Docket
and
Information
Center,
in
the
EPA
Docket
Center
(
EPA/
DC),
EPA
West,
Room
B102,
12
1301
Constitution
Ave.,
NW,
Washington,
DC.
The
EPA
Docket
Center
Public
Reading
Room
is
open
from
8:
30
a.
m.
to
4:
30
p.
m.,
Monday
through
Friday,
excluding
legal
holidays.
The
telephone
number
for
the
Reading
Room
is
(
202)
566­
1744,
and
the
telephone
number
for
the
Air
and
Radiation
Docket
and
Information
Center
is
(
202)
566­
1742).
An
electronic
version
of
the
public
docket
is
available
through
EPA
Dockets
(
EDOCKET)
at
http://
www.
epa.
gov/
edocket.

Use
EDOCKET
to
submit
or
view
public
comments,
access
the
index
listing
of
the
contents
of
the
public
docket,
and
to
access
those
documents
in
the
public
docket
that
are
available
electronically.

Once
in
the
system,
select
"
search,"
then
key
in
the
docket
ID
number
identified
above.
Also,
you
can
send
comments
to
the
Office
of
Information
and
Regulatory
Affairs,
Office
of
Management
and
Budget,
725
17th
Street,
NW,
Washington,
DC
20503,
Attention:
Desk
Office
for
EPA.

Please
include
the
EPA
Docket
ID
No.
(
OAR­
2002­
0086
in
any
correspondence.
13
PART
B
OF
THE
SUPPORTING
STATEMENT
Not
applicable.
No
sampling
or
other
methods
are
used
to
select
respondents
because
all
owners
and
operators
of
facilities
subject
to
the
Semiconductor
Manufacturing
NESHAP
are
required
to
collect
information.
